Quantitative photomodulated thermoreflectance studies of germanium and silicon semiconductors

نویسندگان

  • R. E. Wagner
  • Mandelis
چکیده

The frequency response of the photomodulated thermoreflectance (PMTR) signal has been used to characterize various semiconductor samples, including crystalline Ge/Si, ion-implanted Ge, and amorphous Si. Theoretical modelling has allowed the deconvolution of electron-hole plasmaand thermal-wave contributions to the signal throughout the entire frequency range.

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تاریخ انتشار 2007